Informaçao sobre o Autor

Уваров, И. В.

Edição	Seção	Título	Arquivo
Volume 52, Nº 6 (2023)	МЭМС-УСТРОЙСТВА	MEMS SWITCH BASED ON CANTILEVER WITH INCREASED CONTACT FORCE
Volume 52, Nº 6 (2023)	MODELING	Performance calculation for a MEMS switch with «floating» electrode
Volume 52, Nº 3 (2023)	МЭМС–УСТРОЙСТВА	Fast Electrochemical Micropump for Portable Drug Delivery Module
Volume 54, Nº 2 (2025)	DIAGNOSTICS	Measuring adhesion energy between MEMS structures using an adhered cantilever