Author Details
Амашаев, Р. Р.
| Issue | Section | Title | File |
| Vol 54, No 1 (2025) | TECHNOLOGIES | Development of atomic layer deposition technological platform for the synthesis of micro- and nanoelectronics materials |
| Issue | Section | Title | File |
| Vol 54, No 1 (2025) | TECHNOLOGIES | Development of atomic layer deposition technological platform for the synthesis of micro- and nanoelectronics materials |