Author Details
Il’in, A. I.
| Issue | Section | Title | File |
| Vol 54, No 4 (2025) | ЛИТОГРАФИЯ | Perspectives of electron-beam and ion-beam lithography development in Russia |
| Issue | Section | Title | File |
| Vol 54, No 4 (2025) | ЛИТОГРАФИЯ | Perspectives of electron-beam and ion-beam lithography development in Russia |