Author Details
Smirnova, E. A.
| Issue | Section | Title | File |
| Vol 52, No 4 (2023) | TECHNOLOGIES | Mechanisms of the Redistribution of Carbon Contamination in Films Formed by Atomic Layer Deposition |
| Issue | Section | Title | File |
| Vol 52, No 4 (2023) | TECHNOLOGIES | Mechanisms of the Redistribution of Carbon Contamination in Films Formed by Atomic Layer Deposition |