Author Details
Sharanov, P. Yu.
| Issue | Section | Title | File |
| No 11 (2024) | Articles | Oxidation and Etching of Thin Ruthenium Films in Low Ion Energy Oxygen Plasma |
| Issue | Section | Title | File |
| No 11 (2024) | Articles | Oxidation and Etching of Thin Ruthenium Films in Low Ion Energy Oxygen Plasma |