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Vol 57, No 6 (2023)
Plasma-Enhanced Chemical Vapor Deposition of Thin GaS Films on Various Types of Substrates
Kudryashov M.A., Mochalov L.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Malyshev V.M., Slapovskaya E.A.
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(Rus)
Vol 57, No 6 (2023)
Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma
Mochalov L.A., Kudryashov M.A., Prokhorov I.O., Vshivtsev M.A., Kudryashova Y.P., Slapovskaya E.A., Knyazev A.V.
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(Rus)
Vol 58, No 4 (2024)
Gallium selenide thin films grown on silicon by plasma-enhanced chemical vapor deposition
Kudryashov M.A., Mochalov L.A., Kudryashova Y.P., Slapovskaya E.A.
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(Rus)
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