Author Details
Шаяпов, В. Р.
| Issue | Section | Title | File |
| Vol 58, No 6 (2024) | PLASMA CHEMISTRY | Amorphous SICX:H and SICXNY:H films obtained from hexamethyldisilane vapor in inductively coupled RF discharge plasma |
| Issue | Section | Title | File |
| Vol 58, No 6 (2024) | PLASMA CHEMISTRY | Amorphous SICX:H and SICXNY:H films obtained from hexamethyldisilane vapor in inductively coupled RF discharge plasma |