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Vol 54, No 1 (2025)
AZ nLOF series photoresist films on monocrystalline silicon
Brinkevich D.I., Grinyuk E.V., Prosolovich V.S., Zubova O.A., Kolos V.V., Brinkevich S.D., Vabishchevich S.A.
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(Rus)
Vol 52, No 1 (2023)
Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy
Murin D.B., Chesnokov I.A., Pivovarenok S.A., Efremov A.M.
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(Rus)
Vol 53, No 2 (2024)
Temporary changes in current flow mechanisms in erbium-doped porous silicon
Khamzin E.K., Uslin D.A.
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(Rus)
Vol 53, No 2 (2024)
Structural features and electrical properties of si(al) thermal migration channels for high-voltage photovoltaic converters
Lomov A.A., Seredin B.M., Martyushov S.Y., Tatarintsev A.A., Popov V.P., Malibashev A.V.
PDF
(Rus)
Vol 53, No 4 (2024)
Al Islands on Si(111): Growth Temperature, Morphology and Strain
Lomov A.A., Zakharov D.M., Tarasov M.A., Chekushkin A.M., Tatarintsev A.A., Vasiliev A.L.
PDF
(Rus)
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